Machine vision system for alignment in die-to-wafer bonder
spiedigitallibrary.org
Machine vision system for alignment in die-to-wafer bonder
In this paper, we suggested an alignment mark measurement system for die-to-wafer bonder. The system consisted of a vision system to measure the positions of alignment marks on die and wafer opposite to each other, and a height measurement system to detect the heights of the die and wafer to the vision system. Besides them, a tilt measurement ...
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